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Non-volatile aluminum oxide resistive memory devices on awrapping paper substrate

Figure 1(a) shows the photographic images of the

paper substrate used in this study. The paper substrate

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is a common wrapping paper used for presents

(purchased from Coco Inc., Korea). Figure 1(b) exhibits the schematic illustration, photographic, and

optical microscopic images of the memory devices on

the paper substrate, respectively. To fabricate the

devices, firstly, a large paper sheet was cut into pieces

of appropriate size (1.5 × 1.5 cm2

) to be used as

substrates. The paper substrate was cleaned by dipping

into the isopropyl alcohol for a 1 min, followed by a

drying process in a thermal oven at 80 °C overnight to

remove the residual solvent and moisture on the

substrate (figure 1(a)). The bottom electrodes (Ti/Au/

Al = 10/100/50 nm) were widely deposited on the

center region of the paper substrate by an electron

beam evaporator (for Ti/Au) and thermal evaporator

(for Al) with a deposition rate of 0.5 Å s−1 at a pressure

of ∼10−7 torr. The active layer and the top electrodes

(Al2O3/Au/Al2O3/Au = 30/20/30/50 nm) were

deposited with an 800 μm-diameter circular patterned

shadow mask using the electron beam evaporator with

the same deposition conditions (figure 1(b)).

Figure 2(a) shows the cross-sectional transmission

electron microscopy (TEM) image along the vertical

stacking layer device structure, and figures 2(b) to (e)

show the density of specified elements described by the

brightness of selected colors in the same region as the

TEM image. Because the Al element is also included in

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the active Al2O3 layers, the orange color (figure 2(b))

of Al appeared not only in the bottom Al electrode but

also in the active Al2O3 layers with a slightly dimmer

color compared to that in the bottom Al electrode

which contained only the Al element. As we used Au

material in the top and bottom electrodes and the

active layer was surrounded with Al2O3 layers, the red

color (figure 2(c)) of Au distinctly appeared to be

divided without any intersection in the Al2O3 layers.

The green color (figure 2(d)) of oxygen appeared to be

bright mainly in the Al2O3 layers, and the Pt material

represented by the purple color (figure 2(e)) was used

as a protection layer to prevent physical damage to the

device structure during focused ion beam processing

for making the TEM sample.

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